40 C.F.R. § 469.17
New source performance standards (NSPS).
Cite as 40 C.F.R. § 469.17 (2026)
Any new source subject to this subpart must achieve the following new source performance standards (NSPS). Subpart A—Semiconductor NSPS Effluent Limitations Pollutant or pollutant property Maximum for any 1 day Average of daily values for 30 consecutive days Milligrams per liter (mg/l) TTO 1 1.37 ( 2 ) Fluoride (T) 32.0 17.4 pH ( 2 ) ( 3 ) 1 Total toxic organics. 2 Not applicable. 3 Within the range of 6.0 to 9.0.