Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination Product type Emission factors EF i CF 4 C 2 F 6 CHF 3 c-C 4 F 8 C 3 F 8 NF 3 SF 6 N 2 O Semiconductors (kg/m 2 ) 0.9 1.0 0.04 NA 0.05 0.04 0.20 NA LCD (g/m 2 ) 0.65 NA 0.0024 0.00 NA 1.29 4.14 17.06 MEMS (kg/m 2 ) 0.015 NA NA 0.076 NA NA 1.86 NA Notes: NA denotes not applicable based on currently available information. [89 FR 31919, Apr. 25, 2024]