Default Emission Factors (1-UN 2 O ,j ) for N 2 O Utilization (UN 2 O ,j )

Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN 2 O ,j ) for N 2 O Utilization (UN 2 O ,j ) Manufacturing type/process type/wafer size N 2 O Semiconductor Manufacturing: 200 mm or Less: CVD 1-U i 1.0 Other Manufacturing Process 1-U i 1.0 300 mm or greater: CVD 1-U i 0.5 Other Manufacturing Process 1-U i 1.0 LCD Manufacturing: CVD Thin Film Manufacturing 1-U i 0.63 All other N 2 O Processes 1.0 [89 FR 31921, Apr. 25, 2024]