40 C.F.R. Table I-15 to Subpart I of Part 98
Default Emission Factors (1-U ij ) for Gas Utilization Rates (U ij ) and By-Product Formation Rates (B ijk ) for MEMS Manufacturing for Use With the Stack Test Method
Cite as 40 C.F.R. Table I-15 to Subpart I of Part 98 (2026)
[78 FR 68233, Nov. 13, 2013]