Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing Manufacturing type/process type/gas Default DRE (%) MEMS, LCDs, and PV Manufacturing 60 Semiconductor Manufacturing: CF 4 87 CH 3 F 98 CHF 3 97 CH 2 F 2 98 C 4 F 8 93 C 4 F 8 O 93 C 5 F 8 97 C 4 F 6 95 C 3 F 8 98 C 2 HF 5 97 C 2 F 6 98 SF 6 95 NF 3 96 All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing 60 N 2 O Processes CVD and all other N 2 O-using processes 60 [89 FR 31922, Apr. 25, 2024]