Examples of Fluorinated GHGs Used by the Electronics Industry

Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry Product type Fluorinated GHGs used during manufacture Electronics CF 4 , C 2 F 6 , C 3 F 8 , c-C 4 F 8 , c-C 4 F 8 O, C 4 F 6 , C 5 F 8 , CHF 3 , CH 2 F 2 , NF 3 , SF 6 , and fluorinated HTFs (CF 3 -(O-CF(CF 3 )-CF 2 )n-(O-CF 2 )m-O-CF 3 , C n F 2n+2 , C n F 2n+1 (O)C m F 2m+1 , C n F 2n O, (C n F 2n+1 ) 3N ). [89 FR 31924, Apr. 25, 2024.]