Default Emission Factors (1-U ij ) for Gas Utilization Rates (U ij ) and By-Product Formation Rates (B ijk ) for LCD Manufacturing

Process type factors Process gas i CF 4 C 2 F 6 CHF 3 CH 2 F 2 C 3 F 8 c− C 4 F 8 NF 3 Remote NF 3 SF 6 Etch 1-U i 0.6 NA 0.2 NA NA 0.1 NA NA 0.3 Etch BCF 4 NA NA 0.07 NA NA 0.009 NA NA NA Etch BCHF 3 NA NA NA NA NA 0.02 NA NA NA Etch BC 2 F 4 NA NA 0.05 NA NA NA NA NA NA CVD Chamber Cleaning 1-U i NA NA NA NA NA NA 0.03 0.3 0.9 Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type. [75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]